發表論文:
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J. Zhang, C.-C. Chu, J. Munoz and J.
Chen, Minimum Entropy Based Run-to-Run Control for
Semiconductor Processes with Uncertain Metrology
Delay, J. Process Contr., 19, 1688-1697,
2009.
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J. Chen, C.-C. Chu, J.
Munoz and J. Zhang, Iterative Learning Control for
Processes with Uncertain Time Delay Using Minimum
Entropy, 7th Asian Control Conference,
ASCC09, August, 2009, Hong Kong.
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C.-C. Chu, J. Munoz and J.
Chen, Minimum Entropy Approach of Run-to-Run Control for
Semiconductor Processes with Uncertain Time Delay, 2008 Taiwan/Korea/Japan ChE Conference, 20-22 Nov.
2008, Taipei, Taiwan.
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